ANDWAY CORPORATION LTD.

Andway Corporation is forging ahead with its reliable technologies, products and services, while continuing to grow as it contributes to a prosperous future for people

Product name	MAT 1207BW
Product type	Thermal-Wet Type Gas Scrubber
Product description	1. Vertical Structure of Square-shaped Burn & Wet Chamber is not only a safe design for explosion but a space effectively foot-print. 2. With turbulence burning air supply design, the gas resident time at thermal chamber can be increased and lead to a high treatment efficiency. 3. With 8 heaters across the thermal chamber, the temperature can be in a excellent uniformity. 4. 2 independent parallel sets of heater elements can extent the life-time of the heater and make a easier replacement process. 5. Auto cleaning mechanism can be programmable cleaning sequence control at touch panel and the powder can be removed with water jet nozzle at wet chamber. 6. Middle flange can Isolates burn Chamber from wet Chamber Humidity by air Shield and prevent powder build-up at thermal and wet interface. 7. With long gas path designed wet chamber, high treatment efficiency can be guaranteed. 8. Automatic disassembling device can promises a quick cleaning time and easy maintenance..
Process application	CVD, DIFF, IIP in semiconductor and other toxic, flammable gas industries.

MAT507BW	MAT1027BW
Capacity : 500slm	Capacity : 1200slm
Dimention : 720(W) x 890(D) x 1690(H)mm	Dimention : 900(W) x 1120(D) x 1950(H)mm
Weight : 400kg(Dry)	Weight : 650kg(Dry)
Power : A/C 200~240V, 1phase, 60Amp	Power : A/C 200~240V, 3phase, 75Amp
CDA : 4~7kgf/cm²(60slm), 3/8″Tube	CDA : 4~7kgf/cm2(140slm), 1/2″Tube
N₂: 4~7kgf/cm²(30slm), 1/4″Tube(Optional)	N₂: 4~7kgf/cm2(30slm), 1/4″Tube(Optional)
PCW : 3~5kgf/cm²(4ℓ/min), 1/2″Tube(Optional)	PCW : 3~5kgf/cm2(10ℓ/min), 1/2″Tube(Optional)
City Water : 3~5kgf/cm²(3ℓ/min), 3/8″Tube	City Water : 3~5kgf/cm2(5ℓ/min), 3/8″Tube
Gas Inlet : NW50 Flange 2ports(Optional 4Ports)	Gas Inlet : NW50 Flange 4ports(Optional 6Ports)
Drain : Acid Drain 1) Natural Drain : 40A PVC Pipe 2) Power Drain : 3/4”Socket	Drain : Acid Drain 1) Natural Drain : 40A PVC Pipe 2) Power Drain : 26mm PVC Pipe
Gas Exhaust : ：-50~-100mmH2O,1m³/min, NW63 Flange	Gas Exhaust : -50~-100mmH2O, 2m³/min, NW100 Flange
Cabinet Exhaust : -50mmH2O, 2.5m³/min, Φ100mm	Cabinet Exhaust : -50~-100mmH2O, 5m³/min, Φ140mm

Production equipment and Welding equipment / consumables, Robot automation, Electronic components, devices, materials etc.

	13G\F 12F., No.216, Sec. 2, Nanjing E. Rd., Zhongshan Dist., Taipei City 104, Taiwan (R.O.C.)
	TEL : +886-2-2506-6668　FAX : +886-2-2507-4965